JPH0648859Y2 - ウエハー支持具 - Google Patents
ウエハー支持具Info
- Publication number
- JPH0648859Y2 JPH0648859Y2 JP1989024445U JP2444589U JPH0648859Y2 JP H0648859 Y2 JPH0648859 Y2 JP H0648859Y2 JP 1989024445 U JP1989024445 U JP 1989024445U JP 2444589 U JP2444589 U JP 2444589U JP H0648859 Y2 JPH0648859 Y2 JP H0648859Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- support frame
- base
- entrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 91
- 230000006378 damage Effects 0.000 claims description 32
- 230000002265 prevention Effects 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000003028 elevating effect Effects 0.000 claims description 5
- 230000000717 retained effect Effects 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 241000270728 Alligator Species 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989024445U JPH0648859Y2 (ja) | 1989-03-03 | 1989-03-03 | ウエハー支持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989024445U JPH0648859Y2 (ja) | 1989-03-03 | 1989-03-03 | ウエハー支持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02114938U JPH02114938U (en]) | 1990-09-14 |
| JPH0648859Y2 true JPH0648859Y2 (ja) | 1994-12-12 |
Family
ID=31244299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989024445U Expired - Lifetime JPH0648859Y2 (ja) | 1989-03-03 | 1989-03-03 | ウエハー支持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648859Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2912520B2 (ja) * | 1993-03-13 | 1999-06-28 | 淀川化成株式会社 | ガラス基板収容用カセット |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0220830Y2 (en]) * | 1985-11-05 | 1990-06-06 | ||
| JPH0715138Y2 (ja) * | 1986-02-07 | 1995-04-10 | 信越石英株式会社 | 縦型収納治具 |
| JPS633155U (en]) * | 1986-06-25 | 1988-01-11 | ||
| JPH0249709Y2 (en]) * | 1986-07-25 | 1990-12-27 | ||
| JPH0441173Y2 (en]) * | 1987-04-22 | 1992-09-28 |
-
1989
- 1989-03-03 JP JP1989024445U patent/JPH0648859Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02114938U (en]) | 1990-09-14 |
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